IEEE

A $22 \mu \mathrm{g} /\sqrt{} \text{Hz}$ Noise Floor, $1.6 \text{mg} /\mathrm{g}^{2}$ VRC ...

A Noise Floor, g VRC, High Efficiency MEMS Capacitive Accelerometer Using High-Voltage Orthogonal Excitation Technique Abstract: This work presents a high-voltage orthogonal excitation (HVOE) based ...